Nanopositioning Technologies

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Nanopositioning Technologies

Nanopositioning Technologies: Fundamentals and Applications
Springer | Engineering | January 23, 2016 | ISBN-10: 3319238523 | 409 pages | pdf | 17.67 mb

Editors: Ru, Changhai, Liu, Xinyu, Sun, Yu (Eds.)
Enriches understanding of the latest fundamentals and applications of nanopositioning technologies
Maximizes reader insights into design/modeling/control of nanopositioning systems, nanomanipulation under scanning electron microscopes and nanopositioning for semiconductor inspection
Reviews comprehensively key recent research into nanopositioner design, sensors, actuators, controls and emerging applications

This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.

Number of Illustrations and Tables
76 illus., 203 in colour
Nanotechnology and Microengineering
Electronics and Microelectronics, Instrumentation
Control , Robotics, Mechatronics
Engineering Design

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